Energy -saving: Adopting advanced structural design and control technology can greatly reduce energy consumption and save operating costs.

Stable and reliable: Using high -quality materials and components, after strict testing and inspection, it can run stable for a long time to ensure production efficiency and quality.

Simple operation: Adopt a intelligent control system, easy to operate, and can automatically adjust the temperature and refrigeration as according to the need, and the operation is convenient and fast.

Temperature range: -70 ℃ ~ 250 ℃

Temperature control accuracy: ± 0.01 ℃ ~ ± 0.1 ℃

Refrigeration power: 200W ~ 200KW

Scope of application: ETCH, Thin Film, ion injection and other semiconductor equipment