Stacking design can accommodate up to 12 chambers

The upper and lower transport systems provide a throughput of up to 350wph

Can be configured for front and back cleaning, with up to 5 types of medicinal liquids, and 2 types of medicinal liquids can be recycled

The chamber can be equipped with a two fluid atomization nozzle

The chamber can minimize chemical splashes and ensure a clean wafer processing environment

The dynamic balance and uniformity of the ultra clean air in the chamber are good